Structure and physics mechanical properties of multiperiod vacuum-arc coatings on the basis of two-layer system TiNx/ZrNx [Electronic resource] / O. V. Sobol', A. A. Andreev, T. V. Bochulia, V. A. Stolbovoy, V. F. Gorban', A. V. Yanchev, A. A. Meylekhov //
Journal of Nano- and Electronic Physics. - 2017. - Vol. 9, Issue 1. - Ст. 01032. - DOI 10.21272/jnep.9(1).01032. Рубрики: Scopus
Доп. точки доступа: Sobol', O. V. Andreev, A. A. Bochulia, Tetiana Stolbovoy, V. A. Gorban', V. F. Yanchev, A. V. Meylekhov, A. A. , Переход по DOI