Картка конкретного документа. Це тимчасовиї текст


Structure and nanomechanical properties of NbC and NbCN coatings obtained by cathodic-ARC deposition with pulsed biasing [Electronic resource] / I. Garkusha, V. Taran, O. Tymoshenko, A. Taran, I. Misiruk, S. Romaniuk //
47th EPS Conference on Plasma Physics, EPS 2021. - . - Vol. 2021. - Ст. 173560. - P. 1239-1242.
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